단행본 상세

서지주요정보
From MEMS to Bio-MEMS and Bio-NEMS manufacturing techniques and applications
서명 / 저자 From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou.
저자명 Madou, Marc J.
발행사항 Boca Raton, FL : Taylor & Francis, 2011.

소장자료

등록번호

038709

소장위치/청구기호

KIMM Library / TP248.25.B54 M33 2011

도서상태

대출중

반납예정일

2025.12.15

등록번호

040233

소장위치/청구기호

KIMM Library / TP248.25.B54 M33 2011 c.2

도서상태

대출중

반납예정일

2026.07.28

서지기타정보

서지기타정보
청구기호 TP248.25.B54 M33 2011
판사항 3rd ed.
형태사항 xiii, 636 p. : ill ; 29 cm.
총서명 Fundamentals of Microfabrication and Nanotechnology; 3
언어 English
서지주기 Includes bibliographical references and index.
주제 BioMEMS.   Nanoelectromechanical systems.   TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS -- bisacsh.   TECHNOLOGY & ENGINEERING / Material Science -- bisacsh.   TECHNOLOGY & ENGINEERING / Electronics / Microelectronics -- bisacsh.
ISBN 9781420055160 (hardback)
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